By R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi

ISBN-10: 1558994122

ISBN-13: 9781558994126

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Extra info for Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997

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Fisher for Companies contributions for donating to the Appendix A-Gaseous Corrosion 55 References: 1. , " Reliability of Ceramics for Heat Engine Applications". National Materials Advisory Board, Commission in Sociotechnical Systems NMAB-357. 2. F McLean, "Ceramic Technology for Automotive Turbines" ~~11. AIII. &ram. Sot. 61 (8) 861-71 (1982) 3. R. Cooper, "Kinetics of Refractory Corrosion" Ceram. Eng. Sci. Proc. 2. 1963-89 (1981) 4. H. S. Pettit, "Mechanisms of Hot Corrosion Attack of Ceramic Coating Materials" Conf.

In these with purity SO3 greater 32 High Temperature Corrosion I. Ceramics ( chemical extensive stability research over recent the needed improvements peratures coatings them severe the df in advanced such as AlZO3, of Na2S04 in in this discussed here. (5,6) in oxidizing in salts been systems refractorithrcugh partially may be anticipated result as from that the at high thermal from ceramics melts such melts, gaseous such tem- barrier environments (3) which cause products of the of salt for of great of performed research importance of since on silicon encountered that molten has been on the the components with those on combustion.

TD... -£ 0... cVI QJ . VI ~QJ /;;,~ 0 ~ CJ ~ E .. 'C:3 0 QJ '6' ~ ~ 0. r/)0. ~.. ~ QJ ~... 0 ~~/;;, :3 ~ II .. ~ ~ 51 52 High Temperature Corrosion of Ceramics V. GENERAL DISCUSSION ‘Ihe results silica than that and alumina metallic thermodynamic the experimental silica occur are alloys. the with have been considerably and these were such In the reactions were the reaction conditions conditions possible. in present more resistant Nevertheless. and kinetic were obtained of are that case studies to sulfur-oxygen such materials appropriate.

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Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997 by R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi

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